Pii: S0026-2692(99)00081-6

نویسندگان

  • Kwok Siong Teh
  • Liwei Lin
چکیده

Time-dependent buckling phenomena of polysilicon micro beams have been demonstrated and reported. These beams are suspended 2 mm above the silicon substrate with dimensions of 100 mm (length) × 2 mm (width) × 2 mm (thickness). When a constant input current is supplied at or above a threshold value, electro-thermally induced buckling occurs. It is observed and recorded that the beams exhibit timedependent elongation. Three types of time-dependent material behaviors have been identified, including pure elastic buckling, time-dependent elastoplastic deformation and the combination of melting and irreversible plastic damage. q 1999 Elsevier Science Ltd. All rights reserved.

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تاریخ انتشار 1999